If a semiconductor production facility loses power for a fraction of a second, production losses are enormous. Wafers are processed in conditioned environment. Processing equipment is sensitive, uses expensive tooling and must operate within very strict specifications. A second of downtime can cost more than half a million dollars. These direct financial damages are not acceptable, but also tight delivery schedules to end customers cannot be disturbed by power failures. Prevention of production stops and thus high availability of equipment is crucial for the commercial success of a wafer processing plant. Power quality problems are therefore simply unacceptable in the semiconductor industry.